The Kashiyama NeoDry® N₂ Purge Unit is an oil-free, air-cooled dry vacuum pump built on the NeoDry G-Series multi-stage Roots platform and fitted with an integrated nitrogen purge package. It is available for the NeoDry 15G, 30G, and 36G, and is designed for vacuum processes involving hydrogen, corrosive gases, condensable vapors, and solvents.
Nitrogen purge protection on a proven dry platform
Built on the proven NeoDry multi-stage Roots dry pump platform, the N₂ Purge Unit adds nitrogen purge protection to help safeguard critical internal components and support operational stability in demanding laboratory and semiconductor environments. It is designed for research facilities, national laboratories, semiconductor process development, aerospace testing, and industrial gas applications, providing reliable oil-free vacuum performance while helping reduce corrosion, contamination, and hydrogen-related wear.
Why Choose the NeoDry N₂ Purge Unit?
Vacuum processes involving hydrogen, corrosive gases, or condensable vapors can reduce pump reliability and increase maintenance. This unit combines Kashiyama’s dry vacuum technology with nitrogen purge protection to support:
- Greater process reliability
- Reduced corrosion risk
- Lower maintenance requirements
- Clean oil-free operation
- Improved handling of specialty gas applications
- Long-term performance in demanding environments
Key Benefits
Corrosive-Process Protection
A high-flow nitrogen purge dilutes corrosive and condensable gases before they reach internal components, supporting reliability and service life.
Built for Hydrogen
Purge protection helps guard motor magnets against hydrogen exposure and supports stable operation in hydrogen exhaust and research environments.
True Oil-Free Technology
The NeoDry platform eliminates oil contamination risk while reducing maintenance requirements and operating costs.
Adjustable Purge Control
Integrated pressure regulation and adjustable purge valves let operators tune nitrogen consumption and process protection.
Remote Monitoring & Control
Remote control signals support flow monitoring, purge management, and system shutoff from centralized process control systems.
Air-Cooled Operation
No cooling water is required, which simplifies installation and reduces facility utility costs.
How the N₂ Purge System Works
- Case purge dilutes corrosive and condensable gases
- Gear chamber purge helps prevent corrosive gas intrusion into the oil chamber
- Motor chamber purge reduces exposure to hydrogen and other reactive gases
- Adjustable mass flow control allows precise nitrogen regulation
- Integrated monitoring supports process safety and operational stability
Available Models and Specifications
All models feature single-phase 100 to 240 VAC auto-switching power, air-cooled operation, a low-vibration design, an integrated nitrogen purge package, remote control capability, and oil-free pumping technology.
| Model | Pumping Speed | Ultimate Pressure | Power Consumption |
|---|---|---|---|
| NeoDry 15G N₂ Purge | 250 L/min (15 m³/h) | 0.01 mbar (1.0 Pa) | 0.34 kW |
| NeoDry 30G N₂ Purge | 500 L/min (30 m³/h) | 0.01 mbar (1.0 Pa) | 0.34 kW |
| NeoDry 36G N₂ Purge | 600 L/min (36 m³/h) | 0.007 mbar (0.7 Pa) | 0.55 kW |
Ultimate pressure values shown are without N₂ purge. With an N₂ purge of 20 slm, ultimate pressure is 0.1 mbar (10.0 Pa) across all three models. See the brochure for full specifications.
Ideal Applications
ALD systems, plasma cleaning equipment, semiconductor process development, gas handling, process exhaust.
University and national laboratories, vacuum coating research, materials science testing, analytical instrumentation.
Hydrogen analyzers, hydrogen exhaust systems, fuel cell research, carrier gas applications, desorption analyzers.
Etching operations, evaporation systems, corrosive gas handling, solvent vapor applications, specialty gas exhaust.
Consult SynSysCo before use with specific gas mixtures, concentrations, or flow rates.
Industries Served
Frequently Asked Questions
What is the Kashiyama NeoDry N₂ Purge Unit?
Which NeoDry models are available with the N₂ purge?
What is the N₂ Purge Unit used for?
How does the nitrogen purge protect the pump?
Can the NeoDry N₂ Purge Unit be used with hydrogen?
Is the N₂ Purge Unit oil-free and air-cooled?
Do I need an N₂ purge for standard clean vacuum applications?
How do I request a quote or confirm the right model?
Downloads and Related Products
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Need help selecting the right NeoDry N₂ Purge Unit for your application? Our engineers can review process gases and flow rates, required pumping speed, ultimate vacuum requirements, corrosion concerns, and installation requirements.
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