- Max Pumping Speed (l/min) – 5000
- CFM – 176
- Ultimate Vacuum (Pa) – ≤0.5
- mTorr – 3.75 mTorr
- Max Inlet Pressure – Atmospheric
- Connection Size (Intake/Exhaust) – NW50/NW25
- Rated Motor Output (kw) – 2.2
- Power Source (50/60Hz) – 1- Phase: AC200~240V
- Power Source (50/60Hz) – 3-Phase: AC200~240V
- Gas Ballast – Available (N2 or Air)
- Allowable Max Moisture – 600 g/h
- Noise (dB (A)) – ≤72
- Weight (Kg/lbs) – 125/275

